LPICM

Laboratoires de Physique des Interfaces et des Couches Minces

CNRS / École polytechnique

Bâtiment 406 - Route de Saclay - 91128 Palaiseau Cedex

Site web

• Thermal ALD

• Oxydes

• Transition énergetique (catalyse, PV, batteries, piles à combustibles, nucléaire, ..)
• Transition numérique: (écrans, capteurs, micro-electronique, Qubits, ...)

• Picosun

" Protective coatings for front surface silver mirrors by atomic layer deposition "

DOI : 10.1364/OE.388546

" Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated photoluminescence "

DOI : 10.1016/j.solmat.2021.111172

" Deleterious electrostatic interaction in silicon passivation stack between thin ALD Al2O3 and its a-SiNx:H capping layer: numerical and experimental evidences "

DOI : 10.1016/j.egypro.2017.09.328

• BULKIN Pavel