Zinc sulfide (obtained from elemental zinc and sulfur for electroluminescent panels) was one of the first film deposited by ALD in the 1970s. However, sulfide materials remain still underresearched and today represent less than 10% of ALD articles published each year. The needs for photovoltaic applications, but also for energy …
Each specific use of ALD for industry and academic research applications needs to have specific properties for thin film deposited, optimized throughput, as well as optimized costs, etc… Therefore many different ALD tools and set-up are used and innovative processes using ALD are developed every day. These innovations can come …
This topic will treat aspects like fundamental selection and evaluation of ALD metal organic precursors as well as the numerical modeling of their behavior in ALD conditions. Numerical modeling could be used to assess their thermal stability at the scale of the molecule/surface interaction or their transport and kinetic properties …
Spatial Atomic Layer Deposition (SALD) is a new process that is faster and less expensive than ALD, which opens new fiels of industrial applications for flexible and large substrates (OLEDs, flat displays, photovoltaic cells…). In Spatial ALD the classical sequence of precursor injection + purge is replaced by an alternative …
