The final program and abstracts will be available for viewing and downloading on this page.
Invited speakers
Jolien DENDOOVEN, Ghent University, Belgique, "Nucleation and inherent selectivity of Ru and RuO2"
Maarit KARPPINEN, Aalto University, Finlande, "Unique metal-organic materials & interfaces through ALD/MLD as enablers of novel applications"
Bertrand VILQUIN, Ecole Centrale Lyon, France, "Intégration d'oxyde ferroelectrique par ALD"
| Organisation committee |
|
| Élisabeth BLANQUET | UGA, SIMaP, Grenoble |
| Marceline BONVALOT | UGA, LTM, Grenoble |
| Christophe LABBE | Uni. Caen, CIMAP, Caen |
| Arnaud MANTOUX | UGA, SIMaP, Grenoble |
| David MUÑOZ-ROJAS | UGA, LMGP, Grenoble |
| Nathanaelle SCHNEIDER | CNRS, IPVF, Palaiseau |
| Christophe VALLEE | CNSE Suny Poly, Albany (US) |
| Matthieu WEBER | LMGP, Grenoble |
| Anne CALLEWAERT | IEMN, Univ Lille, Lille |
| Chiara CRIVELLO | IEMN, CNRS, Lille |
| Matthieu DECROCK | IEMN, CNRS, Lille |
| Christophe LETHIEN | IEMN, Univ Lille, Lille |
| Isabelle ROCH-JEUNE | IEMN, CNRS, Lille |
| Peggy STANKOWSKI | IEMN, CNRS, Lille |
| Nathalie VAN CAUTEREN | IEMN, CNRS, Lille |
| Scientific committee |
|
| Naoufal BAHLAWANE | LIST, Luxembourg |
| Mikhael BECHELANY | Uni. Montpellier, CNRS, Montpellier |
| Nicolas BLASCO | Air Liquide |
| Céline CHEVALIER | INL, CNRS, Lyon |
| Stéphane DANIELE | CP2M-ESCPE Lyon, Univ. Lyon 1 |
| Jean-Manuel DECAMS | Annealsys SAS, Montpellier |
| Frédérique DONSANTI | EDF, IPVF, Palaiseau |
| Alain ESTEVE | LAAS, CNRS, Toulouse |
| Rémi GASSILLOUD | CEA Leti, Grenoble |
| Mickael GROS-JEAN | ST Microelectronics, Crolles |
| Carmen JIMENEZ | UGA, LMGP, Grenoble |
| Catherine MARICHY | Uni. Lyon, CNRS, Lyon |
| François MONTAIGNE | IJL, CNRS, Nancy |
| Thomas PROSLIER | CEA IRFU, Saclay |
| Armelle RINGUEDE | IRCP, CNRS, Paris |
| Lionel SANTINACCI | AMU-CNRS, CINaM, Marseille |